Triple Glory News

Pump List Check RF / Sub Module Sort

Ebara , Kashiyama, Edward several type 

1 .Ebara A07V Dry Pump
2. Ebara A30W Pump
3. Kashiyama SD60V II+KMB301T Dry Pump
4. Kashiyama SD609 Dry Pump
5. Kashiyama SDE2003B Dry Pump

6. Yaskawa EELQ-8ZT

7.Edward Pump

DAIHEN MFM-20SA Matcher

SEIKO SEIKI STP-H600C Turbo molecular pump

VAT MDVX-100B-H Auto pressure controller

RF Generator

AD TEC Ax-1000LFIII

Advanced Energy RF Generator Model :FRX600 A

Adavntest 3186 Pulse pattern Generator

DAIHEN / MFT-20SA / Generator DAIHEN / MFG-20SA / Power supply DAIHEN / MFG-20SA3 / Volumcon't

Moritex MHF-100L Light Source

Chroma ESD Test System 58154

Chroma Adlink 52983 PXI I/O Input/Output Card
Chroma Adlink 52981 PXI Digital I/O DIO Input/Output Card
Chroma 52962 Optical Spectrometer
Chroma 52961A Ver. B Dual Channel Nano-Amp Meter 58183E
Chroma PXI 52958 Leakage Test Module with 58183E

TEL CVD Etch Controller :  TRIAS STP AC 250V/8A 039529-2

Implant Disk 1. Axcelis. 2. Parts number：11000-1741. 3. 8 inch for disk Si.

NIKON NVC6B-U CAMERA CONTROL UNIT

Chiller :

Komatsu BCE-5051-A Chiller
SMC Thermo-CON INR-244-633A,

SMC INR-341-54G Chiller