Triple Glory Products

Products

1. Furnace / LPCVD

TEL Indy LPRO , D-Poly / BCD Poly , ALD NIT , ALD SIN

TEL Indy LPRO : VOS-56-/ RCU / L/L
TEL D-Poly / BCD Poly : VOS-56- / RCU / L/L
TEL Indy ALD SIN/NIT : VMM-56-302EX / RF system / RCU / L/L
Spare Parts Sell
ECC Rack , Robot Controller , IO Board ,Motor ,Heater , Temp. CTL M560 , M780 , RCU Unit