Triple Glory Products

Products

1. Furnace / LPCVD

TEL Indy

1. 300 mm Production with Max production 100 Pcs
2. 2 IO Port ,16 Carrier Stock
3. Waves System CTL , Temp CTL M560 M780
4. Heater Type : VOS series , 4 Zone / PID CTL / 500 ~800 Deg+-1Deg
Or convert to others Heater type :
VMM-56-002
VMM-56-101
VMM-56-201
VMM-56-302
VMM-56-304
VMM-56-306
VOS-56-003
VOS-56-101
5. Fork Transfer with 5+1
6. 1 Boat
7. Gas :O2,H2,NO,N2O,TCA (LPRO)
Gas : 1%O2/Ar , SiH4, 1%PH3/Ar ,BCl3 ,ClF3 (Poly )
Gas : NH3 DCS , HF ,F2
Gas : TMA , TMAZ , RF
Gas , 100% H2 , D2
Gas : TEOS