Triple Glory Products

Products

1. Furnace / Oxide / LPCVD

TEL Indy

1. 300 mm Production with Max production 100 Pcs
2. 2 IO Port ,16 Carrier Stock
3. Waves System CTL , Temp CTL M560
4. Heater Type : VMM series , 4 Zone / PID CTL / 150 ~600 Deg+-1Deg
5. Fork Transfer with 5+1
6. 1 Boat
7. Gas :N2, O2 , TMA , TEMAZ