Triple Glory Products

Products

1. Furnace / LPCVD

TEL Indy

1. 300 mm Production with Max production 125 Pcs
2. 2 IO Port ,16 Carrier Stock
3. Waves System CTL , Temp CTL M560
4. Heater Type : VMM series , 5 Zone / PID CTL / 600 – 900 Deg+-1Deg
Or convert to others process Heater type :
VMM-56-002
VMM-56-101
VMM-56-201
VMM-56-302
VMM-56-304
VMM-56-306
VOS-56-003
VOS-56-101
5. Fork Transfer with 5+1
6. 1 Boat
7. Gas :N2, SiH4, 1%PH3/He, ClF3