Triple Glory Products

Products

TEL Indy Plus / Indy +

1. 300 mm Production with Max production 100Pcs
2. 2 IO Port ,18 Carrier Stock
3. Waves System CTL , Temp CTL M560/ M780
4. Heater Type Option :
VMM-56-002
VMM-56-101
VMM-56-201
VMM-56-302
VMM-56-304
VMM-56-306
VOS-56-003
VOS-56-101
5. Fork Transfer with 4+1
6. 2 Boat
7. Gas :N2,SiH4, AsH3/H2
ALD ZrOX