Triple Glory Products
Products
KLA-Tencor Surfscan 6420
Capable of 4" -8" wafers.Non-patterned surface Inspection System.
0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards.
0.02 ppm Haze Sensitivity.
DETAIL
Waves Length 488 nm , 30mw ArLaser, Blue Laser , Spot Size 90µ;Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ;
Throughput 120/6" wph