Triple Glory Products

Products

TEL Alpha303i

1. 300 mm Production with Max production 125 Pcs
2. 2 IO Port ,16 Carrier Stock
3. Waves System CTL , Temp CTL M560
4. Heater Type : VMM series , 5 Zone / PID CTL / 600 – 900 Deg+-1Deg
or convert to others type heater :
VMM-56-002
VMM-56-101
VMM-56-201
VMM-56-302
VMM-56-304
VMM-56-306
VOS-56-003
VOS-56-101
5. Fork Transfer with 5+1
6. 2 Boat
7. Gas :N2, O2, TEOS , PH3 , SiH4 , SiH2Cl2 ,NH3, H2 , 4%H2 ,