Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| Etch | Canon-ANELVA ILD-4100SR |
1. Oxide Dry Etch 2. Vintage : 1996 3. Wafer Size : 200 mm |
| Etch | TEL Etch TE-8401 |
1. Si Dry Etch 2. Vintage : 1992 3. Wafer Size : 200 mm |
| Metrology | Rudolph AXI-935 Defect Inspection |
1. Macro Inspection System 2. Vintage : 2007 3. Wafer Size : 300 mm |
| Metrology | Rudolph FE-IV |
1.Thickness measurement . 2. Model: FE-IV 3. Application 200 mm |
| Metrology | Alcatel Adixen DGC 1001 Helium Leak Detector |
1. Helium Detector 2. Model: DGC1001 3. Maker : Alcatel / Adixen |
| LED tester | Bobble Detector |
1. Bobble Leak Detector 2. Model: 1014-CBL 3. Maker : Intertest |
| Furnace / LPCVD | TEL Indy Plus / Indy + |
1. TESO , NIT ,ALD NIT, ALD High K , Furnace. TEL Indy Plus B-M , TEL Indy Plus A-M , TEL Indy Plus I-M , 2. Vintage：2009-2020 3. Wafer size：12 inch 4.Heater type Option : VMM-56-002 VMM-56-101 VMM-56-201 VMM-56-302 VMM-56-304 VMM-56-306 VOS-56-003 VOS-56-101 |
| Furnace / LPCVD | TEL Indy |
1. DPoly Furnace. 2. Vintage：2007 3. Wafer size：12 inch |
| Furnace / LPCVD | TEL Formula |
1. DPOLY Furnace. 2. Vintage：2009 3. Wafer size：12 inch |
| Furnace / LPCVD | TEL Formula |
1. NIT Furnace. 2. Vintage：2007 3. Wafer size：12 inch |
| Furnace / LPCVD | TEL Alpha303i |
1. TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal , Wet Oxide Furnace. 2. Vintage：2005 3. Wafer size：12 inch 4. Process : TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal, Wet Oxide , Pyro Oxide |
| Furnace / LPCVD | TEL Alpha303i |
1. FTP Anneal Furnace. 2. Vintage：2005. 3. Wafer size：12 inch 4. Process : FTPS NIT SIN FTPS Anneal / SOG Anneal FTPS Alloy FTPS Poly FTPS Sinter / Sintering |