Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| Furnace / LPCVD | TEL Indy Plus / Indy + |
1. Poly , TESO , NIT ,ALD NIT, ALD High K , Furnace. 2. Vintage：2009-2018 3. Wafer size：12 inch 4.Heater type Option : VMM-56-002 VMM-56-101 VMM-56-201 VMM-56-302 VMM-56-304 VMM-56-306 VOS-56-003 VOS-56-101 |
| Furnace / LPCVD | TEL Indy |
1. DPoly Furnace. 2. Vintage：2007 3. Wafer size：12 inch |
| Furnace / LPCVD | TEL Formula |
1. DPOLY Furnace. 2. Vintage：2009 3. Wafer size：12 inch |
| Furnace / LPCVD | TEL Formula |
1. NIT Furnace. 2. Vintage：2007 3. Wafer size：12 inch |
| Furnace / LPCVD | TEL Alpha303i |
1. TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal , Furnace. 2. Vintage：2005 3. Wafer size：12 inch 4. Process : TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal |
| Furnace / LPCVD | TEL Alpha303i |
1. FTP Anneal Furnace. 2. Vintage：2005. 3. Wafer size：12 inch 4. Process : FTPS NIT SIN FTPS Anneal / SOG Anneal FTPS Alloy FTPS Poly FTPS Sinter / Sintering |
| Etch | TEL TE8500P |
1. Oxide Etcher. 2. Vintage：1995-07. 3. E Chuck type |
| Photos | DNS SK-200W-AVP |
1. Coat and Develop, 2C2D. 2. Vintage：1997. 3. Wafer size：6 inch. |
| Metrology | KLA UV-1280SE |
1. 150mm-200mm Wafers. 2. Measures Film Thickness. 3. Refractive Index and Extinction Coefficient. |