Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| Metrology | RUDOLPH FE-VIID |
Defect inspection system Dual Wavelength S/N : 10727 , Vintage :2002 , |
| Pump / RF Rack /Chiller / Laser / IPC | RF Rack | 1.AD TEC Ax-1000LFIII |
| Pump / RF Rack /Chiller / Laser / IPC | Dry Pump |
1 .Ebara A07V Dry Pump 2. Ebara 40 Dry Pump 3. Edward QDP80 Dry Pump 4. Kashiyama SD609 Dry Pump 5. Kashiyama SDE2003B Dry Pump 6. Ulvac PRC-012A+ PDR-090B Dry Pump 7. EELQ-8ZT Dry Pump |
| IC Backend | Origin JPF-3A Cap sealing |
1. Cap sealing machines. 2. Vintage : 2003 3. As Is |
| IC Backend | LTX-credence - Fusion CX | 1. Mixed signal tester |
| Etch | Canon-ANELVA ILD-4100SR |
1. Oxide Dry Etch 2. Vintage : 1996 3. Wafer Size : 200 mm |
| Etch | TEL Etch TE-8401 |
1. Si Dry Etch 2. Vintage : 1992 3. Wafer Size : 200 mm |
| Metrology | Rudolph AXI-935 Defect Inspection |
1. Macro Inspection System 2. Vintage : 2007 3. Wafer Size : 300 mm |
| Metrology | Rudolph FE-IV |
1.Thickness measurement . 2. Model: FE-IV 3. Application 200 mm |
| Metrology | Alcatel Adixen DGC 1001 Helium Leak Detector |
1. Helium Detector 2. Model: DGC1001 3. Maker : Alcatel / Adixen |
| LED tester | Bobble Detector |
1. Bobble Leak Detector 2. Model: 1014-CBL 3. Maker : Intertest |
| Furnace / LPCVD | TEL Indy Plus / Indy + |
1. Poly Furnace. (Zro HiK process or convert to other process ) 2. Vintage：2009 3. Wafer size：12 inch 4.Heater type Option : VMM-56-002 VMM-56-101 VMM-56-201 VMM-56-302 VMM-56-304 VMM-56-306 VOS-56-003 VOS-56-101 |