Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| BG / BM Room | NITTO HR8500II De-tape |
Detaper, 4"-8" Wafer thickness: 300 - 1000 um Power supply: 110 V. |
| PVD / CVD | Oxford PlasmaLab 80 Plus |
Model: Plasmalab 80 Plus Single PECVD chamber, non load-locked Input Power: 208V, 3ph |
| Metrology | NIKON NWL860 WAFER LOADER ( Parrs Machine ) |
Wafer inspection With loader. Sold As Is |
| Metrology | RUDOLPH FE-VIID |
Defect inspection system Dual Wavelength S/N : 10727 , Vintage :2002 , |
| Pump / RF Rack /Chiller / Laser / IPC | RF Rack | 1.AD TEC Ax-1000LFIII |
| Pump / RF Rack /Chiller / Laser / IPC | Dry Pump |
1 .Ebara A07V Dry Pump 2. Ebara A30W Pump 3. Kashiyama SD60V II+KMB301T Dry Pump 4. Kashiyama SD609 Dry Pump 5. Kashiyama SDE2003B Dry Pump |
| IC Backend | Origin JPF-3A Cap sealing |
1. Cap sealing machines. 2. Vintage : 2003 3. As Is |
| IC Backend | LTX-credence - Fusion CX | 1. Mixed signal tester |
| Etch | Canon-ANELVA ILD-4100SR |
1. Oxide Dry Etch 2. Vintage : 1996 3. Wafer Size : 200 mm |
| Etch | TEL Etch TE-8401 |
1. Si Dry Etch 2. Vintage : 1992 3. Wafer Size : 200 mm |
| Metrology | Rudolph AXI-935 Defect Inspection |
1. Macro Inspection System 2. Vintage : 2007 3. Wafer Size : 300 mm |
| Metrology | Rudolph FE-IV |
1.Thickness measurement . 2. Model: FE-IV 3. Application 200 mm |