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Cleaner
1
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10
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5
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10
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IC Backend
4
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2
PVD / CVD
1
CMP
0
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6
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All
Cleaner(1)
Furnace / Oxide / LPCVD(10)
Photos(1)
Etch(5)
Metrology(10)
Microscope(0)
IC Backend(4)
BG / BM Room(2)
PVD / CVD(1)
CMP(0)
Pump / RF Rack /Chiller(6)
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