Triple Glory Products

Products

Categories Title Description
Furnace / LPCVD TEL Indy 1. Process : Oxide , LPRO , Anneal , Poly , NIT , HK , Alloy , TEOS , TEL Indy Furnace.
2. Vintage:2007 or later
3. Wafer size:12 inch
4. Indy BL , Indy IL , Indy AL type .....
Furnace / LPCVD TEL Indy Plus / Indy + 1. Poly , TESO , NIT ,ALD NIT, ALD High K , Furnace.

2. Vintage:2009-2018
3. Wafer size:12 inch
4.Heater type Option :
VMM-56-002
VMM-56-101
VMM-56-201
VMM-56-302
VMM-56-304
VMM-56-306
VOS-56-003
VOS-56-101
Furnace / LPCVD TEL Indy 1. DPoly Furnace.
2. Vintage:2007
3. Wafer size:12 inch
Furnace / LPCVD TEL Formula 1. DPOLY Furnace.
2. Vintage:2009
3. Wafer size:12 inch
Furnace / LPCVD TEL Formula 1. NIT Furnace.
2. Vintage:2007
3. Wafer size:12 inch
Furnace / LPCVD TEL Alpha303i 1. TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal , Furnace.
2. Vintage:2005
3. Wafer size:12 inch
4. Process : TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal
Furnace / LPCVD TEL Alpha303i 1. FTP Anneal Furnace.
2. Vintage:2005.
3. Wafer size:12 inch
4. Process :
FTPS NIT SIN
FTPS Anneal / SOG Anneal
FTPS Alloy
FTPS Poly
FTPS Sinter / Sintering