Triple Glory Products

Products

1. Metrology

Rudolph FE-IV

1. Vintage : 1995 , S/N :10693
2. Thickness measurement system, 8"
3. Power : Ac100V , 1500W
4. Process capability: 0.11 µm, 0.13 µm, 0.15 µm, 0.25 µm, 0.35 µm
No UPS
No EDS and console
No dry pump
No PM special tool / Jig
No VLSI / Calibration wafer
No foundation type
No mini environment
Does not include manuals