Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| Furnace / LPCVD | TEL Indy LPRO , D-Poly / BCD Poly , ALD NIT , ALD SIN |
TEL Indy LPRO : N2, O2, NO,N2O, ATCS (TCA) TEL D-Poly / BCD Poly : SiH4, PH3 ,O2/Ar , BCl3 , ClF3 TEL Indy ALD SIN/NIT : Nh3/DCS / HF/F2 Spare Parts Sell ECC Rack , Robot Controller , IO Board ,Motor ,Heater , Temp. CTL M560 , M780 , RCU Unit |
| Furnace / LPCVD | TEL Indy+ / TEL Indy Plus / TEL Indy plus ALDOX , PEALOX , Ultra OX |
VMM-56-302EX with RCU , VMM-56-002 |
| Furnace / LPCVD | ALPHA-303i Oxide | ALPHA-303i Oxide , N2, O2 , HCl , Middle Temp , Pyro |
| Furnace / LPCVD | TEL Indy |
1. Process : Oxide , LPRO , Anneal , Poly , NIT , HK , Alloy , TEOS , TEL Indy Furnace. 2. Vintage：2007 or later 3. Wafer size：12 inch 4. Indy BL , Indy IL , Indy AL type ..... 5. Spare Parts Sell ECC Rack , Robot Controller , IO Board ,Motor ,Heater , Temp. CTL M560 , M780 , RCU Unit |
| Furnace / LPCVD | TEL Indy Plus / Indy + |
1. TESO , NIT ,ALD NIT, ALD High K , Furnace. TEL Indy Plus B-M , TEL Indy Plus A-M , TEL Indy Plus I-M , 2. Vintage：2009-2020 3. Wafer size：12 inch 4.Heater type Option : VMM-56-002 VMM-56-101 VMM-56-201 VMM-56-302 VMM-56-304 VMM-56-306 VOS-56-003 VOS-56-101 |
| Furnace / LPCVD | TEL Alpha303i |
1. TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal , Wet Oxide Furnace. 2. Vintage：2005 3. Wafer size：12 inch 4. Process : TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal, Wet Oxide , Pyro Oxide 5. Spare Parts Sell ECC Rack , Robot Controller , IO Board ,Motor ,Heater , Temp. CTL M560 , M780 , RCU Unit |
| Furnace / LPCVD | TEL Alpha303i |
1. FTP Anneal Furnace. 2. Vintage：2005. 3. Wafer size：12 inch 4. Process : FTPS NIT SIN FTPS Anneal / SOG Anneal FTPS Alloy 5. Spare Parts Sell ECC Rack , Robot Controller , IO Board ,Motor ,Heater , Temp. CTL M560 , M780 , RCU Unit FTPS Poly FTPS Sinter / Sintering |