Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| Furnace / LPCVD | TEL Alpha303i |
1. TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal , Wet Oxide Furnace. 2. Vintage：2005 3. Wafer size：12 inch 4. Process : TEOS , Poly , NIT , PIQ , Sinter , Alloy ,Sintering , Anneal, Wet Oxide , Pyro Oxide 5. Spare Parts Sell ECC Rack , Robot Controller , IO Board ,Motor ,Heater , Temp. CTL M560 , M780 , RCU Unit |
| Furnace / LPCVD | TEL Alpha303i |
1. FTP Anneal Furnace. 2. Vintage：2005. 3. Wafer size：12 inch 4. Process : FTPS NIT SIN FTPS Anneal / SOG Anneal FTPS Alloy 5. Spare Parts Sell ECC Rack , Robot Controller , IO Board ,Motor ,Heater , Temp. CTL M560 , M780 , RCU Unit FTPS Poly FTPS Sinter / Sintering |
| Etch | TEL TE8500P |
1. Oxide Etcher. 2. Vintage：1995-07. 3. E Chuck type 4. Non ATC Chamber |
| Photos | DNS SK-200W-AVP |
1. Coat and Develop, 2C2D. 2. Vintage：1997. 3. Wafer size：6 inch. |
| Metrology | KLA UV-1280SE |
1. 150mm-200mm Wafers. 2. Measures Film Thickness. 3. Refractive Index and Extinction Coefficient. |